Inventor
Kuo-Chang Kau
Patents indexed
2
Year range
2019 – 2020
Associated with
Years active
2019 – 2020
Total patents
2
Most recent
2020
Frequent collaborator
Jeng-Horng Chen
Domains
Activity by decade
Patents
2
Career timeline
2 patents, 2019–2020
Dot size = forward citations
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Making Tiny Chip Patterns Using Gas and Light
This patent describes an advanced machine that uses a special gas and patterned light, like a tiny stencil, to draw incredibly small features directly onto a silicon wafer for making computer chips.
Making Tiny Chip Patterns with Special Metal-Filled Ink
This patent describes a new light-sensitive material, called a resist, that uses special multi-metal complexes to create incredibly small patterns on computer chips using extreme ultraviolet light.
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