PatentBrief

Inventor

Pi-Yeh CHIA

Patents indexed

1

Year range

2020

Associated with

Years active

2020

Total patents

1

Most recent

2020

Frequent collaborator

Ying-Chih Lin

Domains

semiconductorsconsumer_electronicstelecommunicationsmaterials

Activity by decade

2020s
1

Patents

1

Career timeline

1 patents, in 2020

Dot size = forward citations

20202021

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US 10825684·2020·Taiwan Semiconductor Manufacturing Co TSMC

Making Tiny Chip Patterns with Special Metal-Filled Ink

This patent describes a new light-sensitive material, called a resist, that uses special multi-metal complexes to create incredibly small patterns on computer chips using extreme ultraviolet light.

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