Freescale Semiconductor

Combining Sealed and Exposed Sensors on One Microchip

This patent describes a microchip design that integrates multiple tiny sensors on the same side, where one sensor is exposed to the outside world through a backside hole while others remain protected by a sealed cap.

How to Combine Pressure and Motion Sensors on One Tiny Chip

This patent describes a method for building a single microchip that contains both a pressure sensor and a motion sensor, making devices smaller and more efficient.