Inventor
Joy Cheng
Patents indexed
2
Year range
2020
Associated with
Years active
2020
Total patents
2
Most recent
2020
Frequent collaborator
Ching-Yu Chang
Domains
Activity by decade
Patents
2
Career timeline
1 patents, in 2020
Dot size = forward citations
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How to Clean Tiny Chip Patterns Using a Special Chemical Developer
This patent describes a method for making advanced computer chips using extreme ultraviolet light and a special chemical developer that cleans away tiny metal leftover bits from the chip's patterns.
How to Clean Metal Off Wafers After EUV Chipmaking
This patent describes a specialized system and cleaning fluid used to precisely remove tiny metal bits from silicon wafers after they've been patterned using extreme ultraviolet light for making advanced computer chips.
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