Inventor
Ching-Yu Chang
Patents indexed
3
Year range
2019 – 2020
Associated with
Years active
2019 – 2020
Total patents
3
Most recent
2020
Frequent collaborator
Joy Cheng
Domains
Activity by decade
Patents
3
Career timeline
2 patents, 2019–2020
Dot size = forward citations
Hover or tap any dot to see the patent. Larger dots indicate more forward citations — a proxy for downstream influence.
How to Clean Tiny Chip Patterns Using a Special Chemical Developer
This patent describes a method for making advanced computer chips using extreme ultraviolet light and a special chemical developer that cleans away tiny metal leftover bits from the chip's patterns.
Making Microchips with a Silicon-Containing Photoresist Layer
This patent describes a method for precisely creating tiny patterns on microchips using a special light-sensitive material, called a photoresist, that contains silicon and changes its properties when exposed to light.
How to Clean Metal Off Wafers After EUV Chipmaking
This patent describes a specialized system and cleaning fluid used to precisely remove tiny metal bits from silicon wafers after they've been patterned using extreme ultraviolet light for making advanced computer chips.
Patent monitoring
Get a weekly digest when new patents naming Ching-Yu Chang are indexed.