Inventor

Ching-Yu Chang

Patents indexed

Associated with

Taiwan Semiconductor Manufacturing Co TSMC

Years active

—

Total patents

Frequent collaborator

An-Ren Zi

Domains

semiconductorsconsumer_electronicstelecommunicationssoftware

Patents

US 20250172879·Taiwan Semiconductor Manufacturing Co TSMC

How to Clean Metal Off Wafers After EUV Chipmaking

This patent describes a specialized system and cleaning fluid used to precisely remove tiny metal bits from silicon wafers after they've been patterned using extreme ultraviolet light for making advanced computer chips.

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