PatentBrief

Inventor

Chin-Hsiang Lin

Patents indexed

1

Year range

2020

Associated with

Years active

2020

Total patents

1

Most recent

2020

Frequent collaborator

Joy Cheng

Domains

semiconductorsconsumer_electronicsmanufacturingmaterials

Activity by decade

2020s
1

Patents

1

Career timeline

1 patents, in 2020

Dot size = forward citations

20202021

Hover or tap any dot to see the patent. Larger dots indicate more forward citations — a proxy for downstream influence.

US 10866511·2020·Taiwan Semiconductor Manufacturing Co TSMC

How to Clean Tiny Chip Patterns Using a Special Chemical Developer

This patent describes a method for making advanced computer chips using extreme ultraviolet light and a special chemical developer that cleans away tiny metal leftover bits from the chip's patterns.

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