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US 8487387

How to Combine Pressure and Motion Sensors on One Tiny Chip

This patent describes a method for building a single microchip that contains both a pressure sensor and a motion sensor, making devices smaller and more efficient.

Statusactive
Granted2013
Expires2032
Claims23
Forward citations16
Prior art12
AssigneeFreescale Semiconductor
InventorsMark E. Schlarmann, Hemant D. Desai +2
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