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US 12310123

How TSMC Makes Advanced Silicon-Based Light Sensors

A manufacturing process for high-performance light sensors that use alternating doped regions within a silicon-on-insulator structure to improve detection efficiency.

Statusactive

Granted2025

Expires2042

Claims23

Forward citations0

Prior art7

AssigneeTaiwan Semiconductor Manufacturing Co TSMC Ltd

InventorsLan-Chou Cho, Chewn-Pu Jou +1

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