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US 10825684

Making Tiny Chip Patterns with Special Metal-Filled Ink

This patent describes a new light-sensitive material, called a resist, that uses special multi-metal complexes to create incredibly small patterns on computer chips using extreme u…

Statusactive

Granted2020

Expires2037

Claims22

Forward citations0

Prior art22

AssigneeTaiwan Semiconductor Manufacturing Co TSMC

InventorsYing-Chih Lin, Pi-Yeh CHIA +5

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