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STMicroelectronics SRL

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Year range

2020

consumer_electronicssemiconductorstelecommunicationsautomotivemedical

Key Inventors

Lorenzo Baldo1 Sarah Zerbini1 Enri Duqi1

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1 patents, in 2020

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2020 — How to Build a Tiny Pressure Sensor Inside a Silicon Chip

US 10578505·2020

How to Build a Tiny Pressure Sensor Inside a Silicon Chip

This patent describes a method for building a tiny pressure sensor, called a MEMS sensor, directly inside a silicon chip, where a flexible membrane and a plate form a capacitor that changes with pressure.

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STMicroelectronics SRL

1 patents, in 2020

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