Gas-phase chemical reactor and method of using same
A gas-phase chemical reactor, a system including the reactor, and methods of using the reactor and system are disclosed. An exemplary reactor includes a reaction chamber and is configured to provide a precursor within th…
Original patent title: “Gas-phase chemical reactor and method of using same”
What this patent covers
The actual claim
A gas-phase chemical reactor, a system including the reactor, and methods of using the reactor and system are disclosed. An exemplary reactor includes a reaction chamber and is configured to provide a precursor within the reaction chamber for a soak period—e.g., a period wherein a supply of the precursor to the reaction chamber is ceased and before purging of the reaction chamber begins. This allows relatively high residence times, relatively high partial pressures of the precursor(s) and/or a relatively high absolute pressure to be obtained within the reaction chamber during substrate processing.
What this patent does NOT cover
The boundaries
These exclusions are unique to PatentBrief — derived from the actual claim language, not patent-office boilerplate.
Schematic visualization of the patent's claim structure. Hand-drawn diagrams in progress for each landmark patent.
Patent Abstract
Patent abstract
A gas-phase chemical reactor, a system including the reactor, and methods of using the reactor and system are disclosed. An exemplary reactor includes a reaction chamber and is configured to provide a precursor within the reaction chamber for a soak period—e.g., a period wherein a supply of the precursor to the reaction chamber is ceased and before purging of the reaction chamber begins. This allows relatively high residence times, relatively high partial pressures of the precursor(s) and/or a relatively high absolute pressure to be obtained within the reaction chamber during substrate processing.
Patent Journey
From filing to today
Patent Filed
2022
Patent Granted
2026 · 4yr after filing
Active Today
2026
Highly Cited
10,052 patents cite this
Expires
2042
PatentBrief Score
Impact Score
Strong
Citation count
40/40
Highly cited
Claim breadth
0/20
Narrow claims
Recency
20/20
Granted within 5 years
Assignee scale
0/20
Independent or smaller assignee
PatentBrief Impact Score — based on citation count, claim breadth, recency, and assignee scale. Not a legal assessment.
Citations
Patent lineage
Stay in the loop
Get a weekly digest of new patents.
One email per week. No spam. Unsubscribe anytime.
Keep exploring
Related patents you should know
US 12564871 · 2026
A Fixture for Cleaning Showerheads with Multiple Separate Chambers
This patent describes a cleaning device for showerheads that uses a fixture with three or more separate internal compartments and channels to direct cleaning fluid to the showerhead's upper surfaces.
ASM IP HOLDING BV
US 12324579 · 2025
Surgical Stapler Battery Health Check During Operation
This patent describes a powered surgical stapler that can detect if some of its rechargeable battery cells are damaged while it's actually firing staples, helping ensure the procedure finishes safely.
CILAG GMBH INT
US 12471982 · 2025
Surgical Tool That Combines Energy Treatment and Stapling
CILAG's patent details a surgical instrument that applies therapeutic energy to tissue, monitors its properties, then deploys staples, adapting the stapling based on the initial energy treatment and monitoring.
CILAG GMBH INT
US 11918209 · 2024
Real-Time Surgical Instrument Status on Live Video During Operations
This patent describes a surgical system that shows live video from inside the body and overlays important information about the surgical tool directly onto the screen, helping surgeons operate more precisely.
CILAG GMBH INT
US 8697359 · 2014
How to Use CRISPR-Cas9 to Edit Genes in Human Cells
This patent describes a method and system for precisely altering gene expression in eukaryotic cells, including human cells, using an engineered CRISPR-Cas9 system that targets and cleaves specific DNA sequences.
Massachusetts Institute of Technology
US 4683195 · 1987
How to Make Many Copies of a Specific DNA Segment
This patent describes the Polymerase Chain Reaction (PCR), a fundamental process for making millions of copies of a specific DNA or RNA segment from a tiny sample, enabling its detection.
Cetus Corp
Same assignee
More from ASM IP HOLDING BV
Patent monitoring